摘要
文章报道了用分子束外延(MBE)法在600℃和650℃下,在Si掺杂的GaAs衬底的(311)A和(311)B面上成功地生长了高质量的AlxGa1-As/GaAs单量子阱材料。计算了光荧光(PL)峰值能量,并与实验作了比较。讨论了(311)A和(311)B面上的不同生长特性。
High quality AlxGa1-xAs/GaAs single quantum well have been successfully grown on (311)A and (311)B Si-doped GaAs substrates by molecular beam epitaxy (MBE)at 600℃ and 650℃. The photoluminescence (PL) peak energies are calculated and compared with that of experimental results. The different properties of growth on (311)A and (311)B GaAs substrates are discussed as well.
出处
《半导体光电》
CAS
CSCD
北大核心
1994年第2期129-134,共6页
Semiconductor Optoelectronics
关键词
单量子阱
特性
砷化镓(311)面
Oriented GaAs Substrate, Single Quantum Well, Properties of Growth