摘要
我们首次完全采用MBE技术成功地制作了内含吸收型光栅的GaAIAs/GaAs量子阶增益耦合型分布反馈式半导体激光器.激光器在室温下的激射波长为860um,单模单端输出光脉冲峰值功率超过20mW.器件在至少0℃到80℃的范围内始终保持单纵模激射.作为初步结果,条宽为5~6μm的氧化物条形结构器件的脉冲工作阈值电流约为700mA.
Abstract GaAIAs/GaAs multiquantum well gain-coupled distributed feedback (DFB)lasers with conduction-type-inverted loss gratings are fabricated using molecular beamepitaxy technique for the first time. At room temperature, single mode operationwith lasing wavelength of 860 urn and high power of 20 mW has been achieved un 0der pulse conditions. DFB mode oscillation maintains at least within a temperaturerange from 0℃ to 80℃. As a primary result, a pulsed threshold current of 700 mAis obtained.
关键词
半导体激光器
量子阱
GAALAS/GAAS
Diffraction gratings
Molecular beam epitaxy
Semiconducting gallium compounds