摘要
本文改进和设计了新型可移动式加热电阻炉和反应器，避免了二乙基碲（ＤＥＴｅ）与二甲基镉（ＤＭＣｄ）的直接反应，减了预沉积，在Ｔｅ／Ｃｄ比的控制更为准确的条件下重复稳定地获得了ｘ＝０．２响应波长为１０．６μｍ的Ｈｇ１－ｘＣｄｘＴｅ材料．其中有关组份ｘ值的实验结果首次证明与Ｋｉｓｋｅｒ的热力学模型基本相符．
Abstract An improved movable resistance furnace with a new reactor has been designed and assembled for MOCVD of HgCdTe.Due to the diminution of the predeposition reaction between DETe and DMCd in the reactor and the parasitic reaction on reactor wall,the Hg vapor pressure may be approximately close to its saturation vapor pressure and the Te/Cd ratio is easily controlled. The Hg(1-x)CdxTeepilayers with x=0.2 were reproducibly obtained.The solid composition in Hg(1-x)CdxTe can be verified by Kisker's thermodynamic calculation model. The typicalHg(0.8)Cd(0.2)Te epilayers have FWHM of 250 arcsec in DCXD spectra, carrier concentration of 2× 10(16)cm(-3) with the mobility of 9.2×104cm2/V.s,and infrared transmission of 70%.
关键词
碲镉汞材料
蒸气压
MOCVD
分配比
Chemical vapor deposition
Electric furnaces
Mercury compounds
