摘要
本文介绍了在ＰＥＣＶＤ系统中利用逐层生长技术（ＬａｙｅｒｂｙＬａｖｅｒ）沉积硅薄膜，薄膜在衬底温度只有２５０℃的情况下已晶化．本文对于氢在薄膜沉积过程中的剪裁作用进行了分析，并对薄膜的结构和光电性质作了详细的研究．
Abstract We have achieved crystallized silicon films using layer by layer deposition technique. The effect of hydrogen tailoring has been studied. The structures and optoelectrical properties of the films have been inverstigated in more detail.
