摘要
本文提出一种提高气敏元件灵敏度的方法,这种方法可实现灵敏度的倍增.元件结构为N-P型,元件的工作机制是互补倍增原理.研究表明,在适当条件下,整体气敏元件的灵敏度等于构成它的N、P两种敏感体各自灵敏度的乘积.此外,这种新型气敏元件还可提高热稳定性,减小零点漂移,甚至提高选择性等.本文在理论上给出了实现上述特性的条件.
Abstract A new approach to improve the sensitivity of semiconductor gas sensors is put forth. This gas sensor hasa N-P structure and works with high sensitivity.The operating mechanism of the sensor is based on the compensation multiplication principle. The results suggest that under proper conditions, the sensitivity of the compound gas sensor is equal to the product of the respective sensitivity of the two sensitive bodies N and P. The gas sensor has higher thermostability smaller zero drift and better selectivity. The conditions to achieve these characteristics of gas sensor are presented.