超微粒子气体传感器

Ultrafine Particles Gas Sensor

本文叙述了超微粒子的基本概念及其性质,介绍了超微粒子气体敏感膜的制作方法和电特性,通过和一般半导体传感器的比较,指出了超微粒子传感器的优点。最后还给出了集成化超微粒子多功能传感器的结构模型和制作方法。

This paper describes the basic concept and the characteristics of ultrafine particles, the manufacture method and electric characteristics of ultrafine particles gas sensitive film.In comparison with common semiconductor sensor, the advantages of ultra-fine particles sensor are given. The structure model and the manufacture method of integrated ultrafine particles multifunctional sensor are presented.