位置灵敏原子探针的新发展与新应用

The Latest Development and Application of the Position Sensitive Atom Probe

本文介绍位置灵敏原子探针显微分析实验手段的最新发展、应用与前景。以应用这种技术研究不锈钢与化合物半导体为例，结合实验结果介绍新的图像显示方法。此外还示例概述了位置灵敏原子探针在钢与合金研究中的新应用。最后，作者对世界上三维原子探针的发展前景作了展望。

In this paper, the latest development, application and prospect of micro-analytic experiment method with position-sensitive atom probe are described. New methods to display the images of stainless steel and compound semiconductor are introduced as examples. In addition, The new application of the position-sensitive atom probe in steel and alloys research are also introduced with example.