摘要
本文介绍了一种高效率、高韧性、防渗碳镀铜工艺,可以大辐度提高铜镀层的沉积速度,降低铜层孔隙率,提高产品合格率,具有显著的经济效益和社会效益。
his paper instroduces an anticarbonized copper-plating process with highcurrent efficience and high ductility.This process can increase copper-plated depositing rate,decrease the hole ratio of copper de-posit,increase the qualified ratio of products,so it has remarkable economic benefit and social benefit.
出处
《材料工程》
EI
CAS
CSCD
北大核心
1994年第5期26-28,4,共4页
Journal of Materials Engineering
关键词
防渗碳
镀铜
碱性氧化物
high current efficiency,anticarbonized,copper-plating