用溶胶—凝胶法制备铁电薄膜

The Preparation of Ferroelectrics Thin Films by So1-Gel Processing

介绍了溶胶—凝胶技术制备铁电薄膜的基本原理、工艺过程及工艺特点；综述了溶胶—凝胶法制备铁电薄膜的最新进展。

he essential principle, technological process and advantages of the ferroelectric thin films prepared bysol-gel prcessing are introduced.New achievement in the preporation of ferroelectric thin films by sel-gel processir1g is reviewed.