化学气相淀积在无机新材料制备中的应用

Applications of Chemical Vapor Deposition in Preparation of New Inorganic Materials

本文讨论了化学气相淀积在超细粉，纳米复合材料及梯度功能材料制备中的应用，并结合实例分析了化学气相淀积的工艺特性及所制备材料的性能、显微组织特点。

The applications of CVD in the preparations of ultrafine powders,nanocompositers,and functionally gradient materials were discussed,the processing features of CVD,the properties and the microstructures of the materials thus prepared were analyzed with specific examples.