一种新型的、精密的CCD光电角度测量传感器

New Generation CCD Precise Electron-optical Angle Measurement Sensor

一种新型的高精度光电角度测量传感器（EOAMD），由于其采用了新的角度测量方法，先进的核心光电传感器（CCD电行耦合器件），以及特殊的机械结构和半导体加工工艺技术，具有很多优点，可广泛应用于航空、航天、工业测量与控制、数控机床等众多角度测量领域。文中，描述了该传感器的结构设计，相关采样原理，精度内插算法，测角原理及所能达到的角度分辨率。

A new generation integrated electron-optical ul-tra precise angle measurement device (EOAMD) is devel-oped by the BUAA 5th rourch Lab. The EOAMD adoptsnew angle measurement method. edvanced core electron-optical seneor: CCD (charge coupled-device). special me-Chanical structure and semiconductor manufacture technol-ogy, so that it has so many advantages. Because of all thesereasons, the EOAMD will be widely applied in the aeronau-tics, astronautics. mechanical manufacture, industry mea-surement, numerical controlled machine. and the other au-tomatic control and angle measurement field. In this paper.the device structure design. the electron-optical couple theo-ry and angle measurement method are presented. New spe-cial analog and digitul signal procere circuit and numericalalgorithm has designed to improve the angle resolution ofthe EOMAD.