微型真空力敏器件的研究

The Study of Microvacuum Pressure Sensor

本文首次用电荷模拟法计算了真空微电子力敏传感器的场致发射阴极与阳极间的电场分布,同时计算了<100>晶向的方形硅薄膜受压形变与压力的关系,进而得出了这种传感器的电流-压力曲线.还做了水槽模拟电场分布的实验,理论与实验符合的很好.

For the first time, we employe a charge simulation method to compute theelectric field and potential distribution in a microcavity vacuum tube pressure sensor.The deflection of a <100> oriented thin silicon diaphragm under pressure was calculated.On the basis of the calculations of field and deflection,we obtain the relation betweenthe cathode-anode current and the pressure on the thin diaphragm. To inspect the calcu-lations,we measured the potential distribution of the micro vacuum cavity using a watertrough method.the experimental results are well in agreement with the calculations.