摘要
声表面波气体传感器的最终成功既取决于化学界面膜的性能,也取决于声表面波器件设计的最佳化。给出了声表面波气体传感器的设计考虑。
The ultimate success of SAW gas sensors is dependent on both the performance of
the chemical interface films and the optimization of SAW device design. The design considerations of SAW gas sensors were presented.
出处
《传感器技术》
CSCD
1994年第1期23-28,37,共7页
Journal of Transducer Technology
关键词
气体体感器
设计
声表面波器件
Surface acoustic wave Gas sensor Design consideration
