浸渍涂布法制备ITO气敏薄膜

ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method

利用含In,Sn成分的水溶液,经浸渍涂布工艺在不同衬底上制备了ITO薄膜(掺Sn的In_2O_3薄膜)。采用XRD、XPS、SEM分析了薄膜的结构,成分和表面形貌;测试薄膜的气敏特性,发现其对NO_2有良好的选择性和灵敏度,而且薄膜显示出长时间良好的工作稳定性,可望制成实用的NO_2敏感元件。

ITO thin films were prepared by a dip - coating method using a aqueous solution containing In and Sn elements. Structure, composition and surface morphology of the thin films were examined by XRD, XPS and SEM respectively. The gas sensitive properties of the thin films were investigated and the results indicated that the thin films had a good selectivity and a high sensitivity to NO_2 and their resistances were very steady.