硅振梁振动模态的光学测量

The Optical Measuring of Vibration Mode of Silicon Vibrating Beam

报导了一种用于测量谐振式微力传感器振梁横向振动模态的光学测量系统。该系统使用时间平均激光全息法和光学相关法对振梁的谐振频率、振型、阻尼及Q值等动态参数进行非接触测量,与传统的电测量方法相比,该方法灵敏度高、不产生附加质量和刚度等力学影响,因而可测量微小物体的振动模态,使用该系统对我们研制的第一代硅谐振式微力传感器振梁进行了动态测量。取得满意的结果。为谐振式传感器的进一步优化设计奠定了力学基础。

A optical system for measuring the traverse vibration mode of the vibrating beam of resonant microforce sensor was reported. This system applies time average Laser Holograph and optical correlation methods to remote measurement of the dynamic characteristic of resonant frequency, vibrating mode, resistance and Q value etc. Compared with the traditional electronic measuring methods, it has high sensitivity and does not odd any mechanics effect, such as additional mass and rigidity on the sensor, so that this way can measure the vibration mode of micro-mattes. This system was applied to measure silicon vibrate beam of first age new type resonant micro - forcesensor of our prepared, it has obtained satisfied result, it provide a mechanics fundation to farther optimum design.