STM纳米加工技术进展

REVIEW OF NAO-FABRICATION BY STM

ＳＴＭ（扫描隧道显微镜）作为一种新型的纳米加工工具，在微电子制造，量子、分子器件的制作以及在原子分子尺度内的操作与构建等方面有极大的应用潜力。本文对ＳＴＭ纳米加工方法进行了初步分类，简略介绍了其一般工作原理及发展状况，讨论了其未来的应用前景。

As a new tool in nano-technology,STM (Scanning Tunneling Microscope)has a bright application future in the manufacture of microelectronics,quantum and molecular devices,and in the control and construction of atomand moleculars.Present here are a preiiminary classification of STM nano-fabrication,and a brlef introduction of it’S common principles and develop-ment states.Then we have made a discussion about the potential applicationfuture of STM nano-technolgy.