EDAX能谱仪半定量分析（SQU）中ZAF修正技术的讨论

A discussion to the ZAF correction technique of supper quantitative analysis(SQU)in EDAX

ＥＤＡＸ能谱仪（ＰＶ９１００和ＰＶ９９００）的半定量分析（ＳＱＵ）程序，一般只计算试样百分含量的一级近似值，如果进行ＺＡＦ修正，也只给出一次性修正结果。实际上，试样元素的真实百分含量Ｃ和它的Ｘ射线相对强度比ｋ之间是双曲线关系而非线性关系，只有经过几次迭代计算，才能得到满意的结果。本文仅就ＥＤＡＸ能谱仪的ＳＱＵ分析中ＺＡＦ迭代修正做一讨论。

The provided programs of supper quantitative analysis(SQU) by EDAX(PV9100 and PV9900),oneselfusually gives approximate value in percent content of specimen , if we use the ZAF correction program, it canbrings out only once corrected result, Indeed, the relation between C,the real percent content of element ,andk,the rate of its X-ray relative intensity,is a relation of double curres not a straight line. It can obtains a satis-fied result only if making many times alternation calculation, We make now a discussion only to the alternationcalculation ZAF correction method of the SQUanalysis in EDAX paper.