期刊文献+

GaAs MESFET的压力敏感特性 被引量:2

Properties of Sensitivity of GaAs MESFET to Stress
下载PDF
导出
摘要 本文研究了GaAsMESFET对应力的敏感特性,分析了敏感原理。对GaAsMESFET用作力学量传感器的可能性进行了讨论。 Properties of sensitivity of GaAs MESFET to stress were investigated.The sensitive principle was analysed.The possibility of fabricating force sensor using GaAs MESFET was discussed.
出处 《电子学报》 EI CAS CSCD 北大核心 1994年第2期89-91,共3页 Acta Electronica Sinica
关键词 GAAS MESFET 压力效应 传感器 GaAs MESFET,Piezoelectric effcect,Sensor
  • 相关文献

参考文献3

  • 1黄庆安,中国科学.A,1993年,23卷,4期
  • 2施敏,半导体器件物理,1987年
  • 3徐芝纶,弹性力学教程,1981年

同被引文献14

  • 1张斌珍,李科杰,张文栋,薛晨阳,陈建军.GaAs基微机械加工技术[J].半导体技术,2006,31(7):481-484. 被引量:6
  • 2Mimura T, Hiyamizu S. Fujii Tetal[J]. Appl. Phys. , 1980, 19: 225.
  • 3Lalinsky T, Drzlk M, Jakovenko J, et al. GaAs Based Micromachined Thermal Converter for Gas Sensors[J]. Sensors and Actuators A, 2008, 142 : 147 - 152.
  • 4Boardman D A, Sellin P J. Design and Characterisation of High Electron Mobility Transistors for Use in a Monolithic GaAs X-ray Imaging Sensor[J]. Nuclear Instruments and Methods in Physics Research A, 2001, 466:226-231.
  • 5Hung Ching-wen, Lin Han-lien, Chen Huey-ing, et al. Comprehensive Study of a Pd GaAs High Electron Mobility Transistor (HEMT)-based Hydrogen Sensor[ J]. Sensors and Actuators B, 2007, 122:81 -88.
  • 6Wang X H, Wang X L, Feng C, et al. Hydrogen Sensors Based on AlGaN/AIN/GaN HEMT [ M]. Microelectronics Journal, 2008, 39 : 20 - 23.
  • 7Cui Jing, Zhang Bingzhen, Liu Jun, et al. Design of a Novel Sensor Based on Piezo-Resistive Effect of GaAs/A1GaAs/InGaAs PHEMT[ C]//IEEE-NEMS, 2009.
  • 8Cheng Chin-chuan, Tsai Yan-ying, Lin Kun-wei, et al. Characteristics of a Pd- Oxide - In0.49Ga0.51P High Electron Mobility Transistor( HEMT)-Based Hydrogen Sensor [ J ]. Sensors and Actuators B. , 2006, 113:29 -35.
  • 9贾晓娟,张斌珍,刘俊,薛晨阳,侯婷婷,谭振新,王杰.GaAs基PHEMT加速度传感器的研究[J].传感技术学报,2010,23(2):188-191. 被引量:2
  • 10张兴宏,夏冠群,徐元森,徐波,杨玉芬,王占国.HEMT结构材料中二维电子气的输运性质研究[J].Journal of Semiconductors,1999,20(4):292-297. 被引量:2

引证文献2

二级引证文献3

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部