圆锥浸没透镜电子光学系统的研究

A Study of Electron Optical Systerms for Conical Immersion Lenses

本文研究利用边界元素法计算圆锥透镜场分布，用曲傍轴轨迹方程组、实际轨迹方程组追迹计算各种初条件的带电粒子轨迹，确定电子光学参量。其计算结果Ｓ．Ｙａ．Ｙａｖｏｒ等采用渐近解析方法的结果相符。

In the present paper,computation of electrostatic field distribution for conical immersion lenses is studied by using the boundary element method(BEM),and the electron trajectories incident from the object and image spaces have been traced using a set of curvilinear paraxial trajectory equations and practical trajectory equations, then the electron optical paramenters, such as cardinal points of lens, have been determined. The computational results coincide with the analytical asymptotical method given by S. Ya. Yavor et al.