新结构的硅一体化微加速度传感器

A New silicon Unitized Micro-Acceleration Sensors

本文介绍了一种新结构的硅一体化微加速度传感器，理论和实验结果表明，这种传感器与传统硅微机械结构加速度传感器相比具有温度特性好、工艺简单和成品率高等优点。这种结构特别适合制作谐振传感器。

A new silicon unitized micro-acceleration sensor is presented in this paper. Both analysis and experiment show that it has many advantages over the conventional structure,such as good temperature characteristics,simple process technique,high yield and so on. The structure is most suitable for manufacturing resonant sensors.