STM隔振系统的复模态分析

Complex Matrix Analysis of STM's Vibration Isolating System

用复模态分析法求出了针对扫描隧道显微镜（ＳｃａｎｎｉｎｇＴｕｎｎｅｌｌｉｎｇＭｉｃｒｏｓｃｏｐｅ，简称ＳＴＭ）隔振系统的运动解和振幅传递函数的解析表达式．从该表达式可以看出．隔振系统第一级参数极大地影响着整个系统的隔振性能．然后用由本方法计算得出的三维和二维图象分析ＳＴＭ隔振系统．在悬挂弹簧加磁阻尼系统和金属块中夹橡胶圈系统的比较中，得出了一些有用的结论．

Analytic expressions of vibration solution and amplitude transfer function of the vibration isolating systemof scanning tunneling microscope are given by complex matrix analysis. From these expressions. it can be seen that thefirst stage parameters affect greatly the vibration isolatins performance of the whole system. Then. some 2 or 3-dimensional graphs generated utilizing the method ate used to analyse the vibration isolating system. Comparing the springsuspended system with plate stacks system gives some useful conclusions.