对双光束激光诱导沉积氧化锌膜的电镜测定

Determination of Double Photo-beams Laser-Induced Deposition Zinc Oxide Films by Electron Microscopy

报道了采用双光束紫外激光辅助有机金属化学气相沉积（ＭＯＣＶＤ）技术获得氧化锌（ＺｎＯ）薄膜（厚度５０～２００ｎｍ）的电镜研究结果。反射高能电子衍射（ＲＨＥＥＤ）和扫描电子显微镜（ＳＥＭ）指出，采用该生长技术在较低生长温度下，在云母衬底上易生长出沿ｃ轴取向的单晶膜。在云母、单晶硅和玻璃衬底上都可得到表面结构致密而均匀的微晶或多晶膜。在适当条件下在玻璃衬底上还可以得到非晶膜。这些膜层均具有较好的可见光透过率。

In this paper,we have obtained ZnO films (thickness～102 nm)by laser induced deposition technique. These deposited ZnO films are characterized bu reflection high energy electron diffraction(RHEED)and scanning electron microscopy(SEM). The RHEED indicate that the highest structure perfection occurred on mica substrate and the coincidence of the direction of ZnO and mica. The SEM shows that the films are microcrystals, polycrystalline and amorphous stat at different temperature of growth but the uniformity of the films is very good.These experimental results indicated that the ZnO films obtained by laser induoed MOCVD technique possessed far better structure,lower temperature of growth than that Obtained by any other method.