酒敏传感器的研制

Study of Alcohol Vapour Sensors

描述采用薄膜溅射系统制作以ＳｎＯ~２为主的酒敏元件。给出了对元件灵敏度、选择性、响应恢复时间、抗干扰能力及重复性等测试结果，并以酒敏元件为核心，组装了乙醇气氛浓度测报传感器。

By useing thin film sputtering system,fabrication of alcohol sensitive elements which mainly contain SnO￣2 is described. The measured results of the elements for sensitivity,selectivity,responserestore time, antidisturbance ability and repeatability are presented.An alarm equipment in which the element is an essential part also described.