离子束增强沉积Si，Al，Y复合薄膜对304不锈钢抗氧化性的影响

SYNTHESIS OF THIN FILMS WITH Si,Al AND Y BY IBED TO IMPROVETHE OXIDATION-RESISTANCE OF 304 STAINLESS STEEL

用离子束增强沉积方法，在３０４不锈钢表面上制备了Ｓｉ，Ｙ—Ｓｉ，Ａｌ，Ｙ－Ａｌ薄膜，研究了它们在９５０℃、１０５０℃空气中的氧化，并采用ＥＰＭＡ及ＳＥＭ等技术分别对氧化产物进行了分析。对离子束增强沉积薄膜样品的抗氧化性、ＳｉＯ２膜的形成过程及Ｙ的作用进行讨论。

The Si, Y-Si, Al and Y-Al thin films have been synthesized on the surface of 304 stainless steel by IBED (Ion Beam Enhanced Deposition)technique,and their oxidation behavior have been studied at 950℃ and 1050℃. EPMA and SEM have been employed to characterize the oxidation morphology,element distribution and constituents of the oxide scale.On the basis of the results,the oxidation behavior of the specimens with Si,Al,Y thin films,the forming process of SiO2 scale and the beneficial effects of Y are discussed.