一种新颖的超大点阵分束实现方法

A Novel Superlarge Spots Arrays Beam Splitting

首次提出了一种实现超大卢、阵光束分束的新方法，它是利用位相迭加原理和ＶＬＳＩ技术将光栅分束器和位相型菲涅耳微透镜列阵集成为一体，构成了一种新型的光束分束列阵器件—一菲涅耳计算机源生全息分来器（ＣＧＦＢＳ），以实现１２８×１２８，甚至更高卢、阵数的光点分束。

novel method for superlarge spots arrays beam splitting is proposed for the first time. It can beintegrated into one device by use of splitting grating and phase Fresnel microlens arrays based on phaseadding principle and VLSI technique. A new type of beam arrays splitter computer generated Fresnelbeam splitter (CGFBS) is formed. It enables spots splitting of 1 28 X 1 28 and superlarge spots arrays.