一种合成金刚石膜的独特方法──燃烧焰法合成金刚石膜述评

An Unique Method of Diamond Film synthesis─Review of Diamond Film Synthesis by Combustion Flam

燃烧焰法与其他合成金刚石膜的ＣＶＤ法相比，具有设备简单、投资少、膜质量高、生长速率高的特点。本文对燃烧焰法的成膜机理、膜均匀性、大面积成膜、改善膜的质量等方面国内外研究现状进行了述评，最后预测了燃烧焰法可能的发展方向。

The combustion flame deposition process is more simple equiprnent.inexpensive investment better quality and faster deposition rate thanthat of other CVD deposition procees.The researchand development aboard and home on the svnthesisdiamond film in the flame,Such as nucleation andgrowth mechanism,homogeneous film,Large areadeposition and film quality,are reviewed.Finally.Some possible developping directions of combustionflame method are foreasted.