激光分子束外延

Laser Molecular Beam Epitaxy

激光分子束外延是在传统分子束外延和普通激光淀积技术基础上发展起来的一种最新制备薄膜和人工超晶格方法。本文介绍了激光分子束外延的工作原理，与传统分子束外延和普通激光淀积技术的区别，主要特点和发展现状，并对其前景进行了简要的评价。

The Laser Molecular Beam Epitaxy (Laser MBE) is a new growth method of the films and the superlattices based on the conventional MBE and the pulsed Laser Deposition (PLD).The principle, the most important features and the recent progress on Laser MBE are surveyed in this paper, The prospect on Laser MBE is briefly evaluated also.