摘要
对无明胶重铬酸盐全息记录软片（ＮＧＤ）的光正性抗蚀特性进行了分析研究，通过对溶解度的分析及红外光谱的测定，首次提出ＮＧＤ是一种新型的紫外正性光抗蚀材科，给出了实验及分析结果。
In this paper we present a study of the positive photoresistant characteristics of nongelatin dichromated holographic film (NGM). Through the analysis of the solubility and the measurement of the IR spectrum, at the first time, we put forward that NGM is a new kind of UV positive photoresist. The experimental and the analytical results are also given.
出处
《光电工程》
CAS
CSCD
1994年第3期61-64,共4页
Opto-Electronic Engineering
基金
国家教委博士点基金
关键词
全息胶片
紫外光学材料
光致抗蚀剂
NGD
Holographic films, Ultraviolet optical materials, photoresists, Performance analysis, Solubility, Spectral measurement.
