一种双光束自动测试光栅绝对与相对光谱衍射效率的原理性方案

A Principle Scheme of Double Light Beam and Automatic Measuring the Absolute and Relative Diffraction Efficiency of Gratings

提出了一种快速自动测试光栅光谱衍射效率的新方法。重点推导了测试平面光栅绝对光谱衍射效率与相对光谱衍射效率公式，介绍了双光束高精度自动测试光栅光谱衍射效率曲线的基本原理、方案与方法，并分析了测试精度。研究表明，本方案的测试速度和精度均比一般测试方法提高一倍，并能有效地消除光源波动对测量结果的影响，测量误差小于５×１０－３。

This paper suggests a new method for rapid and automatic measuring the spectral diffraction efficiency of gratings.We have derived the formalae on testing the absolute and relative spectral diffraction efficiency of plate gratings, and introduced the basic principle of high accurate and automatic measuring the spectral diffraction efficiency of gratings. The analysis indicates that the measuring accuracy and speed of this method will be better than the common method. The measurement of the uncertainty is less than 5×10-3.