摘要
报导一种新型全息记录材料(DC─TAC)的光化学刻蚀特性,给出了刻蚀深度对曝光量以及对显影时间的依赖关系,还讨论了刻蚀过程中图形传递的失真度问题。指出了DC─TAC作为微光学元件光刻材料的重要应用前景。
This paper reports photochemical etching property of dichromated cellulose triacetate (DC-TAC),a new holographic recording material;The curves of etched depth depending on exposure and development times are given. The distortion of profiles transfer in the processing is also discussed. The paper points out that there is a good prospect in using DC-TAC as photoetching material of micro-optical elements.
出处
《光电工程》
CAS
CSCD
1994年第4期48-51,47,共5页
Opto-Electronic Engineering
关键词
全息胶片
蚀刻
光刻材料
微光学元件
Holographic films,Etching,Photolithographic materials.