共焦激光扫描显微镜技术进展

Progresses of the Technology of Confocal Laser Scanning Microscope

共焦激光扫描显微镜已延伸到光学显微术领域，包括共焦荧光显微镜、共焦扫描光纤显微镜、彩色共焦激光显微镜、共焦光栅光学显微镜等。并很快成为半导体材料检测和生物医学诊断的重要工具。本文对国外该显微镜技术的特性和新的进展进行了综述。

The rapid development of confocal laser scanning microscope(CLSM)have already ex-tended the domain of optical microscopy. The following aspects were covered:confocal-fluorescence mi-croscope,confocal-scanning fibre-optic microscope,colour-confocal laser microscope,confocal-gratingoptical microscope and so on. They have rapidly become the important tools detecting semiconductormaterials,diagnosing in biomedicine, Some properties and new progresses of CLSM are reviewed in this paper.