摘要
本文介绍了中科院上海光机所研制的ＣＤＭＳ一１型电视线宽测量系统设计及检测。线宽测量技术主要用于集成电路生产的在线测量，以及掩模制造中的质量控制，ＣＤＭＳ一１型电视线宽测量仪利用计算机对集成电路图像进行数字处理，从而保证了仪器测量精度。经检测表明该系统的各项测试指标均达到原设计要求。
The paper introduces the design and test for Model CDMS--1 Video Scanning LinewidthMeasurement System developped by Shanghai Institute of Optics and Fine Mechanics.Thelinewidth measurement technolog is mainly used in IC manufacture and mask quality control.This instrument gains high acctiracy by using computer digital image processing technology.The test result of this measurement system shows that all expected system specifications are achieved.
出处
《光学精密工程》
EI
CAS
CSCD
1994年第1期89-94,共6页
Optics and Precision Engineering
关键词
线宽测量
光学计量仪器
集成电路
Linewidth Measurement,Optical Metrology Instruments
