摘要
主要介绍了光栅尺动态测量仪的数据采集和数据处理系统部分。该系统采用了软硬件相结合的方法,因而体积小、造价低、功能强、操作简便,且又在软件上注意了对激光波长的修正、被测光栅尺的修正及测试数据的平均处理,从而保证了仪器的总体精度。
The data acquisition and processing system for dynamic measurement of grating linearscale is described.Adopting both software and hardware,it is charactarized by small volume,cheapness, strong fumction and easy operation. The correction of both laser wavelength andtested grating linear scale and the data averaged processing are considered in the program to ensure the whole precision.
出处
《光学精密工程》
EI
CAS
CSCD
1994年第3期89-93,共5页
Optics and Precision Engineering
关键词
光栅尺
数据处理系统
激光干涉仪
Grating linear scales, Data Processign system,Laser interferometer