同步辐射超光滑X光学元件的加工工艺及检测技术的研究

study on Fabricafion and Testing of Supersmooth Soft X-Ray Optical Elements for Synchrotron Radiation

综述了该领域的研究现状，发展水平，以及同步辐射光学元件的特点；对超光滑表面的加工工艺及检测技术进行了归纳总结；详细阐述了本人所承担的中国科学院高能物理所同步辐射光束线的关键部件一超环面反射镜的加工与检测的研究。用户反馈的信息表明其性能优于美国生产的同类产品，标志着在该领域，我们已接近或达到国外先近水平。

The first part of the thesis gives a description in detail about the recent situation and development in this field ,the character of the supersmooth X-ray/EUV optical elements forsynchrotron radication photoemission experiments ,sums up the fabrication method and testing technology at present.The second part of this thesis describes the research which authorhas been engaged in on the fabrication and testing of the supersmooth toroidal mirror.According to the use of the toroidal mirror in beam line 4B9B at BEPC, We know that the main technology parameter of the toroidal mirror we produced is superior to that of the same product made in U.S.A.