薄膜波导光隔离器和光电子单片集成技术

Thin Film Waveguide Optical Isolator and optic-electronic Intergration on a Single Substrate

叙述了Ｂｉ，Ａｌ：ＹＩＧ薄膜的液相外延生长，研究了这种薄膜材料的光吸收系数、法拉第旋转角、磁光优值及生长感生磁各向异性与Ｂｉ含量的关系。在此基础上，连续外延生长了作单模磁光波导的双层Ｂｉ，Ａｌ：ＹＩＣ薄膜。光纤偏振器的使用使薄膜波导光隔离器向实用化迈进了一步，恒磁薄膜作偏磁场为器件集成化作出了贡献。采用ＭＯＣＶＤ技术，在ＧＧＧ（钆镓石榴石）基片上同时外延生长Ⅲ－Ⅴ族半导体薄膜和钇铁石榴石（ＹＩＧ）薄膜，把光隔离器和磁光光源直接集成在一起，是一种非常有前景的光电子集成组件。

Bi, Al: YIG films have been grown on GGG substrate. The optical absorption, Faraday rotation, figure of merit and growth -induced magnetic anisotropy have been investigated to be related to Bi content of the film. Double-layered Bi, Al: YIG film have also been grown to be used as single mode waveguide. Fiber polarizier is used to make thin film waveguide optical isolator more realizeable. Perment magnet thin film is used as bias magnetic field, which gives contributions to intergration. Successfully epitaxial growth of Ⅲ-V semiconductor and YIG thin films on GGG substrate by MOCVD intergrates optical isolator and laser source togather, which introduces a kind of optic-electronic intergrated device haying a best future.