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含二元光学元件的光学系统成像特性和设计方法 被引量:5

Imaging Properties & the Methods of Design for Optical System with Binary Optics Elements
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摘要 二元光学元件(BOE)用于常规光学系统可以提供附加设计参数和选择光学材料的自由度。本文主要研究了基面为平面或球面的旋转对称BOE的成像特性以及设计制作的方法:用两种等效模型推导了BOE的初级象差,分析了产生差别的物理实质;给出一、三级成像特性与色差公式,编制了程序可解析求解满足初级象差平衡的折/衍混合系统的初始结构参数,用CODE—V校算,结果吻合;给出了生成掩膜的算法,编制了程序,在激光照排机上输出了掩膜图。最后结合可见、紫外、红外波段的3个典型系统设计例子,讨论了二元光学元件在光学系统中应用的场合和限制。 Binary optics element(BOE)used in conventioi1al system can provide addition alparamemeters ,freedom for material selection in optical design.This thesis mainly studies theimage properties & the methods of design and fabrication :By using two equivalent models,BOE's primary aberrations are deduced,the reason for the difference of these two models is analyzed;lst order and 3rd order image properties and chromatic aberrations are presented,and the program for the aberration analysis and the prelimenary solutions of refractive-diffractive hybrid system.which satisfies the balance of primary aberrations is accomplished,the resuIts are comsistent with those given by CODE V;The algorithm and program formask generating are presented,and the mask film is output using laser imager.With the design examples for some typical systems in visible,ultra-violet,infrared band,the applicationsof the BOE and its limitations are discussed in the end.
作者 张新
出处 《光学精密工程》 EI CAS CSCD 1994年第4期1-7,共7页 Optics and Precision Engineering
关键词 二元光学 衍射 光学设计 光学元件 光学系统 Binary optics, Diffraction,Optical design ,CAD
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