压电陶瓷微位移驱动器在精密工件台上的应用研究

Applied Research on Precision Positioning Workpiece Stage with Piezoelectric Micro-Displacement Actuator

以压电陶瓷微位移原理为基础，对精密驱动技术在精密定位工件台上的应用作了实验研究。一个是对工件台的微动台进行驱动，另一个是对导轨直线进行误差补偿。设计了一个包括高压精密可调电源、压电微位移驱动器、作为反馈元件的光栅干涉仪。

Basing on the principle of micro-displacement of piezoelectric ceramic,Author have donethe research work on. the precise actuator technique,which is used for precise positioningworkpiece stage. One is to actuate the fine stage of the workpiece stage,the other is to compensate the error of the straightness of the sliding guide. Author designs a principal and subordinate controlling system. The whole system includes a ajustable high precise power,piezoelectric micro-displacement actuator,a grating interferometer acting as the feedback element, and a controlling system organized by IBM-pC computer and several 803l microcontroller。