精确测量长凹球面曲率半径的差分干涉微机系统

Differential Interferential Microprocessor-based Measurement System for Precision Measuring the Radius of Curvature of Long Radius Concave Optical Surfaces

给出了一种在比较短的工作长度上精确测量长凹球面镜曲率半径的单片微机测试系统，介绍了该微机系统的基本原理、计算方法、硬件电路设计、误差分析及在应用中必须的详细资料。

A microprocessor-based measurement system for precision measuring the radius of curvature of very long radius concave optical surfaces in a relatively short working length is described.Its basic theory,hardware circuit design,error analysis and the detailed informationnecessary to provide for its practical application is presented.