一种近贴式微通道板空间光调制器

A proximity-focused microchannel spatial light modulator

对由光电阴极、微通道板、网电极及斜切电光晶体ＬｉＮｂＯ＿３组成的新型全近贴式微通道板空间光调制器（ＭＳＬＭ）进行了系统地研究．详述了该器件的设计考虑及关键工艺过程．研制出了一种对紫外光响应的开放式ＭＳＬＭ样管．并用其实现了二维光强度空间调制．

A proximity-focused microchannel spatial light modulator that consists of a photocathode, a microchannel plate, a mesh electrode, and an oblique-out LiNbO3 plate [(ZX1 ) 55°)] is investigated. This paper describes the design consideration and the fabrication techniques. A prototype device optically addressed with ultraviolet light from a mercury lamp has been built and the two- dimensional He- Ne laser light-intensity modulation experiments were performed.