腔内倾斜标准具法压缩KrF激光线宽

Bandwidth Narrowing Output in KrF Laser by Intracavity Titling Etalons

在一台长脉冲放电泵浦ＫｒＦ准分子激光器上，对采用腔内倾斜标准具法压缩线宽进行了研究．采用平行平面腔结构，在谐振腔中加入小孔光阑以控制横模振荡，并加入０．１ｍｍ空气隙、０．５ｍｍ固体和３ｍｍ固体三个标准具体作为线宽压缩元件，实验中研究了不同光阑孔径及输出耦合率对输出线宽和输出能量的影响．实验获得的线宽小于３ＧＨｚ，相当于线宽压缩一千倍．

Intracavity titling etalons were used to reduce the bandwidth of KrF laseroutput. The laser device used in our experimentS is a discharge pumped long pulseduration KrF excimer laser. its optical cavity consisted of a flat toeal reflector and a flatoutput coupler. Two apertures were placed inside the optical cavity to control thetransverse modes, and three F-P etulons provided spectral dispersion. These etulons were0. 1 mm air-sacced, 0. 5 mm solid, and 3 mm solid. In the experimentS, the influence ofthe apertllres and the reflectivity of output coupler were Studied. By selecting suitablediameters, output linewidth no more than 3GHz can be obtained, this value is 1000times smaller than the linewirth from free running.