摘要
本文分析了ＳＩＭＯＸ／ＳＯＩ和ＤＷＢ／ＳＯＩ结构的性能特点．尝试用ＤＷＢ／ＳＯＩ材料制备不同波导层厚度的平面光波导样品，并测试了１．１５μｍ和１．５２３μｍ激光的ＴＥ和ＴＭ模的传输损耗．１．５２３μｍ光的ＴＥ模的最小传输损耗已达０．２７ｄＢ／ｃｍ．说明ＤＷＢ／ＳＯＩ材料是一种有潜力的光波导材料．
The structure characteristics of SIMOX/ SOI (Separation by implantedoxygen/ silicon on insulator) and DWB (direct wafer bonding)/SOI are discussed. Someplanar optical waveguides samples with different thickness of layer were fabricated inDWB/SOI structure. The propagstion losses were measured for both TE and TM modesat wavelenths of 1. 15 μm and 1. 523 μm. The lowest loss is close to the intrinsicaborption of pure crystal silicon. It indicated that the DWB/SOI structure is a POtentialmaterial for optical waveguides.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1994年第2期169-172,共4页
Acta Optica Sinica
基金
传感技术国家实验室资助
关键词
光波导
SOI材料
硅
键合工艺
optical waveguides
direct wafer bonding
silicon on insulator.
