硅衬底上锗硅合金光波导的研制

Fabrication of Silicon-Based GeSi Alloy Optical Waveguides

报道锗硅合金在λ＝１．３μｍ的脊形单模光波导的设计、工艺及测量结果．这种光波导的传播损耗已达０．７ｄＢ／ｃｍ．脊形的高４～８μｍ，宽８～１２μｍ，均和单模光纤芯径相当．此外，其数值孔径在光波导的输入、输出端均能和单模光纤匹配，它已满足硅光集成对光波导的要求．文中最后报道了用这种锗硅合金光波导试制Ｙ分支器，并观察到二支分路输出的单模光斑．

The new development in silicon optical integration, and the design andprocesses of fabricating GeSi/Si single-mode rib waveguide at the wavelength λ=1. 3μmis reported. The propagating loss of the waveguide has reached 0. 7 dB/cm. The heightand width of the waveguide are 4～8 μm and 8～12 μm respectively. The size of themare comparable to those of single-mode fibre cores. Besides, the numerical aperture of thewaveguide at the ends are also matched to the fibre. The fabricated waveguide meets allthe demands of silicon optical nitegration. Finally, the single mode outputs from a Y-power-divider prepared by the GeSi-Si rib waveguides discribed above is shown.