SOI梯形大截面单模脊形波导的研制

Fabrication of SOI Single-Mode Rib Wavegulde with Large Trapezoidal Cross-Section

报道了硅片直接键合ＳＯＩ单模梯形大截面脊形波导的研制．对于波长为１．３μｍ的光，这种脊形波导的传输损耗小于０．８５ｄＢ／ｃｍ．

A SOI (st h con - on - insulator ) single-- mode rib waveguide with large trapezoidal cross-section formed by SDB(silicon wafers direct bonding) process has been fabricated.And the SDB SOI rib waveguide losses are below 0:85dB/cm by measurements at a wavelength of 1.3μm.