激光双焦干涉球面轮廓仪实时扫描及数据处理系统

The System on Real-time Scanning and Data Treating of the Double Focus Laser Interference Spherical Profilometer

介绍了一种双焦干涉球面扫描轮廓仪，该仪器利用计算机及自动控制系统对曲率半径从±5mm～±30mm的球面进行扫描驱动及采样，并将球面轮廊信号通过A/D转换及数据处理后显示打印表面轮廓参数。整个系统功能齐全。

The double focus interference spherical scanning profjlometer is introduced in this pa-Per. Using computer and its automatic control system,the Ptofilometer can scan the sPhere, the radius of curvature from + 5 millimeter to + 30 millimeter, and take samples. The surface profiles pearneters are disPlayed and Ptinted after A/D conversion and data Processing. All functions of the System is well. The new technique and instrument are entirely suitable for sPherical profiles self-testing.