摘要
针对精确测量薄层厚度的要求，本文提出一种新的同态信号处理的方法，这种方法在于得出被测信号能量谱ＥＳ的对数导数的付里叶反变换的包络。仿真结果表明，估计值与实际值非常相近。
A homomorphic signal processing method is presented for aecurate thickness measurement of thin layers.The method consists in taking the envelope of the inverse Fourier Transform of a corrected logarithnic derivative of the energy spectrum(ES) of the measured signal. Simulations show execllent agreement between estimated and actual values .
出处
《国防科技大学学报》
EI
CAS
CSCD
北大核心
1994年第2期77-81,共5页
Journal of National University of Defense Technology
关键词
同态信号处理
薄层厚度
超声测量
ss: homomorphic signal processing
energy spectrum
Fourier transform
