摘要
分析了调相式容栅位移传感器的工作原理，针对其原理非线性误差．提出了一种高精度的调相式容栅位移传感器，并对其进行了理论分析．
This paper introduces the charateristics of capacitance-grate displacement transducers and analyses the working theory of PM-type capacitance-grate dlisplacement transducers. It prcsents a PM- type capacitance-grate dispacement transducer with high accuracy in view of the thcoretical non- inearity error and analyses it in theory.
关键词
电容
位移
传感器
误差
容栅
capacitance grate，displacement, transducer, error
