摘要
本文介绍了国内外目前利用激光进行微孔加工的研究现状;指出了影响做孔加工精度的主要因素;讨论了激光精密微孔加工技术在电子工业中各种可能的应用。
In the Paper, the present research situation of microhole drilling technology using laser beam at home and abroad has been introduced,and the Primary factors which effect the Processing precision of drilled microhole have been pointed. Finally,We discussed the various possible appli cations of precision micrchole drilling technology using laser beam in electronic industry.
出处
《杭州电子工业学院学报》
1994年第3期4-10,共7页
Journal of Hangzhou Institute of Electronic Engineering
基金
电子科学研究院"激光精密打孔技术"课题
关键词
电路连线
激光加工
微孔
电子工业
Laser
Microhole Drilling
Application to Electronic Industry