摘要
非接触式光纤外差干涉位移传感器是将半导体激光器线性调频技术和光纤传感技术相结合制成的1种新型外差干涉仪。它的位移测量范围可达26mm，分辨率为0．02μm；对不同材料、不同粗糙度的对象面，有着几乎相同的测量灵敏度和测量精度；探头和对象面无需严格垂直。
An optical non-contract displacement sensor is a novel heterodyneinterferometer, and it is a type of new heterodyne interferometers which combine the semiconductor laser frequency modulating technology with opticalsensor technology, Its displacement measuring range is 26mm with the resoluLion of 0.02μm. There are nearly the same measuring sensitivity and accuracyfor the different surface materials and roughness and it is not crucial whetherthe working surface is exactly perpendicular to the probe or not.
出处
《航空计测技术》
1994年第6期4-8,16,共6页
Aviation Metrology & Measurement Technology
关键词
半导体激光器
光纤
调频
外差干涉
传感器
Semiconductor laser, Optical fibber, Frequency modulation Heterodyne interferometer, Sensor
