碳团簇及C_（60）负离子的产生

Extraction of C_(60)￣- and carbon cluster ion beams from a Cs sputtering negative ion source

利用铯负离子溅射源（ＳＮＩＣＳ－Ⅱ）和石墨阴极产生并引出了碳团簇负离子流，观察到了一些电子亲和势很小的团簇．用Ｃ６０／Ｃ７０混合物做阴极，也引出了Ｃ６０及其碎片的负离子束。分析了碳团簇负离子束流的质谱组成特点和束流变化的一些规律。

Carbon cluster ion beams were extractrd from a Cs sputtering negative ion source with a graphite sputtering cathode. A few kinds of ions with relatively weak electron affinity were observed. From the same ion source, negative cluster ion beams of C60,C70 and their dissociated products were also obtained with a cathode containing the mixture of C6o and C70.Some characteristics of the cluster ion mass spectra for both cathodes were described, and the dependence of the C60 beam current intensity on the operation parameters was also given.