摘要
介绍用于测量ＭＯＳ电容、ＭＯＳＦＥＴ、半导体元器件和集成电路辐照效应的微机测试系统及其功能，并给出该系统在半导体辐射损伤研究甲的应用实例．
A computer based measurement system for the study of radiation effects on MOS structures, such as MOS capacitors, MOSFETs, semiconductor devices and integrated circuits was introduced in this paper. The system's function was described and some application examples were given.
出处
《核技术》
CAS
CSCD
北大核心
1994年第9期542-547,共6页
Nuclear Techniques
关键词
半导体器件
集成电路
辐射效应
Semiconductor devices
Integrated circuits
Radiation effect
Computer based measurement system
